Abstract
This work presents a portable transdermal drug delivery system that combines a magnetically actuated micro gear pump with a microneedle array. Micropart fabrication is performed through DXRL and LIGA techniques. The manufacturing process of both micropump and microneedle array are described together with wear issues. Results show that the assembled device can deliver rates that go from 0.1 to 1.2 ml/min at gear speed ranging from 1000 to 8500 rpm. First skin piercing experiments are also described.
Original language | English |
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Pages (from-to) | 1066-1073 |
Number of pages | 8 |
Journal | Microelectronic Engineering |
Volume | 85 |
Issue number | 5-6 |
DOIs | |
Publication status | Published - May 2008 |
Keywords
- Deep X-ray lithography
- LIGA
- Soft lithography
- Transdermal drug delivery
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Surfaces, Coatings and Films
- Atomic and Molecular Physics, and Optics