A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout

Luciano Prandi, Carlo Caminada, Luca Coronato, Gabriele Cazzaniga, Fabio Biganzoli, Riccardo Antonello, Roberto Oboe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Motivated by the increasing demand of integrated inertial-sensing solutions for motion processing and dead-reckoning navigation in handheld devices and low-cost GPS navigators, this paper reports the details of a 3-axis silicon MEMS vibratory gyroscope that fulfills the pressing market requirements for low power consumption, small size and low cost. Thanks to a compact mechanical design that combines a triple tuning-fork structure within a single vibrating element, our solution achieves satisfactory performance in terms of thermal stability, cross-axis error, and acoustic noise immunity by using a small die size. Furthermore, the presence of a single primary vibration mode for the excitation of the 3 tuning-forks, together with the possibility of sensing the pickoff modes in a multiplexing fashion, allows to design a small-area, low-power ASIC.

Original languageEnglish
Title of host publicationDigest of Technical Papers - IEEE International Solid-State Circuits Conference
Pages104-105
Number of pages2
DOIs
Publication statusPublished - 2011
Event2011 IEEE International Solid-State Circuits Conference, ISSCC 2011 - San Francisco, CA, United States
Duration: Feb 20 2011Feb 24 2011

Other

Other2011 IEEE International Solid-State Circuits Conference, ISSCC 2011
CountryUnited States
CitySan Francisco, CA
Period2/20/112/24/11

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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    Prandi, L., Caminada, C., Coronato, L., Cazzaniga, G., Biganzoli, F., Antonello, R., & Oboe, R. (2011). A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout. In Digest of Technical Papers - IEEE International Solid-State Circuits Conference (pp. 104-105). [5746238] https://doi.org/10.1109/ISSCC.2011.5746238