A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout

Luciano Prandi, Carlo Caminada, Luca Coronato, Gabriele Cazzaniga, Fabio Biganzoli, Riccardo Antonello, Roberto Oboe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

50 Citations (Scopus)

Abstract

Motivated by the increasing demand of integrated inertial-sensing solutions for motion processing and dead-reckoning navigation in handheld devices and low-cost GPS navigators, this paper reports the details of a 3-axis silicon MEMS vibratory gyroscope that fulfills the pressing market requirements for low power consumption, small size and low cost. Thanks to a compact mechanical design that combines a triple tuning-fork structure within a single vibrating element, our solution achieves satisfactory performance in terms of thermal stability, cross-axis error, and acoustic noise immunity by using a small die size. Furthermore, the presence of a single primary vibration mode for the excitation of the 3 tuning-forks, together with the possibility of sensing the pickoff modes in a multiplexing fashion, allows to design a small-area, low-power ASIC.

Original languageEnglish
Title of host publicationDigest of Technical Papers - IEEE International Solid-State Circuits Conference
Pages104-105
Number of pages2
DOIs
Publication statusPublished - 2011
Event2011 IEEE International Solid-State Circuits Conference, ISSCC 2011 - San Francisco, CA, United States
Duration: Feb 20 2011Feb 24 2011

Other

Other2011 IEEE International Solid-State Circuits Conference, ISSCC 2011
CountryUnited States
CitySan Francisco, CA
Period2/20/112/24/11

Fingerprint

Gyroscopes
MEMS
Tuning
Silicon
Application specific integrated circuits
Multiplexing
Acoustic noise
Global positioning system
Costs
Navigation
Thermodynamic stability
Electric power utilization
Processing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Prandi, L., Caminada, C., Coronato, L., Cazzaniga, G., Biganzoli, F., Antonello, R., & Oboe, R. (2011). A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout. In Digest of Technical Papers - IEEE International Solid-State Circuits Conference (pp. 104-105). [5746238] https://doi.org/10.1109/ISSCC.2011.5746238

A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout. / Prandi, Luciano; Caminada, Carlo; Coronato, Luca; Cazzaniga, Gabriele; Biganzoli, Fabio; Antonello, Riccardo; Oboe, Roberto.

Digest of Technical Papers - IEEE International Solid-State Circuits Conference. 2011. p. 104-105 5746238.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Prandi, L, Caminada, C, Coronato, L, Cazzaniga, G, Biganzoli, F, Antonello, R & Oboe, R 2011, A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout. in Digest of Technical Papers - IEEE International Solid-State Circuits Conference., 5746238, pp. 104-105, 2011 IEEE International Solid-State Circuits Conference, ISSCC 2011, San Francisco, CA, United States, 2/20/11. https://doi.org/10.1109/ISSCC.2011.5746238
Prandi L, Caminada C, Coronato L, Cazzaniga G, Biganzoli F, Antonello R et al. A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout. In Digest of Technical Papers - IEEE International Solid-State Circuits Conference. 2011. p. 104-105. 5746238 https://doi.org/10.1109/ISSCC.2011.5746238
Prandi, Luciano ; Caminada, Carlo ; Coronato, Luca ; Cazzaniga, Gabriele ; Biganzoli, Fabio ; Antonello, Riccardo ; Oboe, Roberto. / A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout. Digest of Technical Papers - IEEE International Solid-State Circuits Conference. 2011. pp. 104-105
@inproceedings{129511fadca042fca5017db3003710ab,
title = "A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout",
abstract = "Motivated by the increasing demand of integrated inertial-sensing solutions for motion processing and dead-reckoning navigation in handheld devices and low-cost GPS navigators, this paper reports the details of a 3-axis silicon MEMS vibratory gyroscope that fulfills the pressing market requirements for low power consumption, small size and low cost. Thanks to a compact mechanical design that combines a triple tuning-fork structure within a single vibrating element, our solution achieves satisfactory performance in terms of thermal stability, cross-axis error, and acoustic noise immunity by using a small die size. Furthermore, the presence of a single primary vibration mode for the excitation of the 3 tuning-forks, together with the possibility of sensing the pickoff modes in a multiplexing fashion, allows to design a small-area, low-power ASIC.",
author = "Luciano Prandi and Carlo Caminada and Luca Coronato and Gabriele Cazzaniga and Fabio Biganzoli and Riccardo Antonello and Roberto Oboe",
year = "2011",
doi = "10.1109/ISSCC.2011.5746238",
language = "English",
isbn = "9781612843001",
pages = "104--105",
booktitle = "Digest of Technical Papers - IEEE International Solid-State Circuits Conference",

}

TY - GEN

T1 - A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout

AU - Prandi, Luciano

AU - Caminada, Carlo

AU - Coronato, Luca

AU - Cazzaniga, Gabriele

AU - Biganzoli, Fabio

AU - Antonello, Riccardo

AU - Oboe, Roberto

PY - 2011

Y1 - 2011

N2 - Motivated by the increasing demand of integrated inertial-sensing solutions for motion processing and dead-reckoning navigation in handheld devices and low-cost GPS navigators, this paper reports the details of a 3-axis silicon MEMS vibratory gyroscope that fulfills the pressing market requirements for low power consumption, small size and low cost. Thanks to a compact mechanical design that combines a triple tuning-fork structure within a single vibrating element, our solution achieves satisfactory performance in terms of thermal stability, cross-axis error, and acoustic noise immunity by using a small die size. Furthermore, the presence of a single primary vibration mode for the excitation of the 3 tuning-forks, together with the possibility of sensing the pickoff modes in a multiplexing fashion, allows to design a small-area, low-power ASIC.

AB - Motivated by the increasing demand of integrated inertial-sensing solutions for motion processing and dead-reckoning navigation in handheld devices and low-cost GPS navigators, this paper reports the details of a 3-axis silicon MEMS vibratory gyroscope that fulfills the pressing market requirements for low power consumption, small size and low cost. Thanks to a compact mechanical design that combines a triple tuning-fork structure within a single vibrating element, our solution achieves satisfactory performance in terms of thermal stability, cross-axis error, and acoustic noise immunity by using a small die size. Furthermore, the presence of a single primary vibration mode for the excitation of the 3 tuning-forks, together with the possibility of sensing the pickoff modes in a multiplexing fashion, allows to design a small-area, low-power ASIC.

UR - http://www.scopus.com/inward/record.url?scp=79955745056&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79955745056&partnerID=8YFLogxK

U2 - 10.1109/ISSCC.2011.5746238

DO - 10.1109/ISSCC.2011.5746238

M3 - Conference contribution

SN - 9781612843001

SP - 104

EP - 105

BT - Digest of Technical Papers - IEEE International Solid-State Circuits Conference

ER -