A low-power interface for the readout and motion-control of a MEMS capacitive sensor

S. A. Jawed, D. Cattin, M. Gottardi, N. Massari, R. Oboe, A. Baschirotto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A low-power interface for readout and motioncontrol of a MEMS capacitive sensor is presented. The interface consists of a hybrid third-order sigma-delta modulator. The interface enhances the linearity and stability of the sensor by applying force feedback through bias voltage modulation. The modulator employs a hybrid, continuous + discrete -time topology, to reduce power consumption by avoiding a separate pre-amplifier for the sensor. Power consumption in the modulator is further reduced by an opamp sharing scheme. The interface is designed in 0.35um CMOS technology and is simulated in Cadence-Spectre. Simulation results are shown for a MEMS capacitive Microphone1.

Original languageEnglish
Title of host publicationInternational Workshop on Advanced Motion Control, AMC
Pages122-125
Number of pages4
Volume1
DOIs
Publication statusPublished - 2008
Event10th International Workshop on Advanced Motion Control, AMC'08 - Trento, Italy
Duration: Mar 26 2008Mar 28 2008

Other

Other10th International Workshop on Advanced Motion Control, AMC'08
CountryItaly
CityTrento
Period3/26/083/28/08

ASJC Scopus subject areas

  • Computer Science Applications
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Modelling and Simulation

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    Jawed, S. A., Cattin, D., Gottardi, M., Massari, N., Oboe, R., & Baschirotto, A. (2008). A low-power interface for the readout and motion-control of a MEMS capacitive sensor. In International Workshop on Advanced Motion Control, AMC (Vol. 1, pp. 122-125). [4516052] https://doi.org/10.1109/AMC.2008.4516052