Analysis of an electromechanical ΣΔ modulator for MEMS sensors based on sliding mode control

Riccardo Antonello, Roberto Oboe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Many MEMS sensors use a closed loop sensing interface to enhance their performances. ΣΔ modulation is often employed in such interfaces in order to simultaneously satisfy the requirements of performance enhancement and analog-to-digital conversion of the sensed quantity. Despite their simple structure, ΣΔ modulators have a complex dynamics that is not completely understood yet: thus, designers must resort to approximated, heuristic methods or extensive numerical simulations in order to assess stability or predict performances of such devices. In this paper we show that the condition for a correct mode of operation of a single-bit, low-pass ΣΔ modulator can be restated in terms of existence of a sliding mode in the system. We use this observation in order to design a ΣΔ modulation-based sensing interface for MEMS sensors, and to analyze its stability in a rigorous way, exploiting system-theoretical tools such as Lyapunov stability and passivity properties. Simulation results are provided to support the argumentation.

Original languageEnglish
Title of host publicationProceedings of the 2007 4th IEEE International Conference on Mechatronics, ICM 2007
DOIs
Publication statusPublished - 2007
Event4th IEEE International Conference on Mechatronics, ICM 2007 - Kumamoto, Japan
Duration: May 8 2007May 10 2007

Other

Other4th IEEE International Conference on Mechatronics, ICM 2007
CountryJapan
CityKumamoto
Period5/8/075/10/07

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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    Antonello, R., & Oboe, R. (2007). Analysis of an electromechanical ΣΔ modulator for MEMS sensors based on sliding mode control. In Proceedings of the 2007 4th IEEE International Conference on Mechatronics, ICM 2007 [4280004] https://doi.org/10.1109/ICMECH.2007.4280004