Design of a Delta-Sigma bandpass demodulator for a Z-axis MEMS vibrational gyroscope

Emilia Nunzi, Riccardo Antonello, Roberto Oboe, Paolo Carbone, Ernesto Lasalandra, Guido Spinola, Luciano Prandi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes the design of a Δ ∑ bandpass demodulator for a Z-axis MEMS vibrational gyroscope. In this MEMS device, a silicon mass is driven through electrostatic actuator so that it has a sinusoidal linear motion, with a controlled speed. Attached to such driving mass, a second mass, free to move in the direction orthogonal to the motion of the first mass, is subjected to a Coriolis force, proportional to the product of the first mass speed by Z-axis rotational speed. The sensing of the Coriolis force and, in turn, of the Z-axis rotational speed, Is performed in closed loop fashion, by measuring the restoring force needed for keeping the sensing mass at the equilibrium position. The restoring force is applied to the sensing mass through a quantized actuation signal, which is obtained from the output bit stream of a band-pass Delta-Sigma converter, containing the information of the Coriolis force. The design of the sensing control loop and simulation results regarding the signal-to-noise ratio achievable with the proposed design is reported. Finally, the issue of the realization of the proposed solution with switched capacitor (SC) technology is also addressed.

Original languageEnglish
Title of host publicationIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
Pages238-242
Number of pages5
Volume1
Publication statusPublished - 2005
EventProceedings of the 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2005 - Monterey, CA, United States
Duration: Jul 24 2005Jul 28 2005

Other

OtherProceedings of the 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2005
CountryUnited States
CityMonterey, CA
Period7/24/057/28/05

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Nunzi, E., Antonello, R., Oboe, R., Carbone, P., Lasalandra, E., Spinola, G., & Prandi, L. (2005). Design of a Delta-Sigma bandpass demodulator for a Z-axis MEMS vibrational gyroscope. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM (Vol. 1, pp. 238-242). [MB5-01]