Exploring the potential of MEMS gyroscopes: Successfully using sensors in typical industrial motion control applications

Riccardo Antonello; Roberto Oboe

doi:10.1109/MIE.2012.2182832

Exploring the potential of MEMS gyroscopes: Successfully using sensors in typical industrial motion control applications

Riccardo Antonello, Roberto Oboe

Istituto di Neuroriabilitazione Motoria San Camillo

Research output: Contribution to journal › Article › peer-review

Abstract

The advent of microelectromechanical system (MEMS) technology has enabled the development of miniaturized, low-cost, low-power sensors that are becoming more and more competitive with respect to their macroscale counterparts. The competitiveness of MEMS sensors largely resides in their reduced cost, size, and power requirements, including all those features that are strictly correlated with the miniaturization and batch fabrication processes involved in their manufacture. In addition to providing competitive alternatives to existing solutions, MEMS technology has also made possible the development of completely new devices or applications where microscale phenomena are effectively pursued to achieve results that would be unfeasible at a macroscale, e.g., in the case of inkjet printing heads or the micromirror arrays for video projectors [1].

Original language	English
Article number	6173644
Pages (from-to)	14-24
Number of pages	11
Journal	IEEE Industrial Electronics Magazine
Volume	6
Issue number	1
DOIs	https://doi.org/10.1109/MIE.2012.2182832
Publication status	Published - Mar 2012

ASJC Scopus subject areas

Electrical and Electronic Engineering
Industrial and Manufacturing Engineering

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10.1109/MIE.2012.2182832

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Exploring the potential of MEMS gyroscopes: Successfully using sensors in typical industrial motion control applications

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