Abstract
The advent of microelectromechanical system (MEMS) technology has enabled the development of miniaturized, low-cost, low-power sensors that are becoming more and more competitive with respect to their macroscale counterparts. The competitiveness of MEMS sensors largely resides in their reduced cost, size, and power requirements, including all those features that are strictly correlated with the miniaturization and batch fabrication processes involved in their manufacture. In addition to providing competitive alternatives to existing solutions, MEMS technology has also made possible the development of completely new devices or applications where microscale phenomena are effectively pursued to achieve results that would be unfeasible at a macroscale, e.g., in the case of inkjet printing heads or the micromirror arrays for video projectors [1].
| Original language | English |
|---|---|
| Article number | 6173644 |
| Pages (from-to) | 14-24 |
| Number of pages | 11 |
| Journal | IEEE Industrial Electronics Magazine |
| Volume | 6 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Mar 2012 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Industrial and Manufacturing Engineering
Cite this
Exploring the potential of MEMS gyroscopes : Successfully using sensors in typical industrial motion control applications. / Antonello, Riccardo; Oboe, Roberto.
In: IEEE Industrial Electronics Magazine, Vol. 6, No. 1, 6173644, 03.2012, p. 14-24.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Exploring the potential of MEMS gyroscopes
T2 - Successfully using sensors in typical industrial motion control applications
AU - Antonello, Riccardo
AU - Oboe, Roberto
PY - 2012/3
Y1 - 2012/3
N2 - The advent of microelectromechanical system (MEMS) technology has enabled the development of miniaturized, low-cost, low-power sensors that are becoming more and more competitive with respect to their macroscale counterparts. The competitiveness of MEMS sensors largely resides in their reduced cost, size, and power requirements, including all those features that are strictly correlated with the miniaturization and batch fabrication processes involved in their manufacture. In addition to providing competitive alternatives to existing solutions, MEMS technology has also made possible the development of completely new devices or applications where microscale phenomena are effectively pursued to achieve results that would be unfeasible at a macroscale, e.g., in the case of inkjet printing heads or the micromirror arrays for video projectors [1].
AB - The advent of microelectromechanical system (MEMS) technology has enabled the development of miniaturized, low-cost, low-power sensors that are becoming more and more competitive with respect to their macroscale counterparts. The competitiveness of MEMS sensors largely resides in their reduced cost, size, and power requirements, including all those features that are strictly correlated with the miniaturization and batch fabrication processes involved in their manufacture. In addition to providing competitive alternatives to existing solutions, MEMS technology has also made possible the development of completely new devices or applications where microscale phenomena are effectively pursued to achieve results that would be unfeasible at a macroscale, e.g., in the case of inkjet printing heads or the micromirror arrays for video projectors [1].
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UR - http://www.scopus.com/inward/citedby.url?scp=84859741790&partnerID=8YFLogxK
U2 - 10.1109/MIE.2012.2182832
DO - 10.1109/MIE.2012.2182832
M3 - Article
AN - SCOPUS:84859741790
VL - 6
SP - 14
EP - 24
JO - IEEE Industrial Electronics Magazine
JF - IEEE Industrial Electronics Magazine
SN - 1932-4529
IS - 1
M1 - 6173644
ER -