Abstract
The advent of microelectromechanical system (MEMS) technology has enabled the development of miniaturized, low-cost, low-power sensors that are becoming more and more competitive with respect to their macroscale counterparts. The competitiveness of MEMS sensors largely resides in their reduced cost, size, and power requirements, including all those features that are strictly correlated with the miniaturization and batch fabrication processes involved in their manufacture. In addition to providing competitive alternatives to existing solutions, MEMS technology has also made possible the development of completely new devices or applications where microscale phenomena are effectively pursued to achieve results that would be unfeasible at a macroscale, e.g., in the case of inkjet printing heads or the micromirror arrays for video projectors [1].
| Original language | English |
|---|---|
| Article number | 6173644 |
| Pages (from-to) | 14-24 |
| Number of pages | 11 |
| Journal | IEEE Industrial Electronics Magazine |
| Volume | 6 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Mar 2012 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Industrial and Manufacturing Engineering