Abstract
A novel method for creating various complex patterned structures from a single ellipsoidal dot prepattern by capillary force lithography (CFL) is presented. The fabrication with CFL of various gold patterns with a patterned area of 5 × 5 mm2 is investigated. This approach provides an inexpensive method for producing various patterns with only a few masters. It also enables the practical generation of nanoscopic patterns from microscopic mold. This approach to controllable patterning is potentially useful in the fabrication of unique nanopatterns or nanostructures without the need for complicated and expensive methods. This method is cost-effective and can be used in mass production.
Original language | English |
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Pages (from-to) | 4392-4398 |
Number of pages | 7 |
Journal | Advanced Materials |
Volume | 19 |
Issue number | 24 |
DOIs | |
Publication status | Published - Dec 17 2007 |
ASJC Scopus subject areas
- Materials Science(all)