MEMS-based accelerometers use in hard disk drives

R. Oboe

Research output: Contribution to journalArticlepeer-review


We describe the use of micro electro-mechanical systems (MEMS)-based accelerometers for the compensation of vibrations in commercial hard disk drives (HDDs). Using formal analysis of the HDD mechanics, effects of generic roto-translation on the head position are evaluated. It is shown that such effects can be compensated using feed forward compensation from a weighted sum of the signal provided by two linear and one rotational accelerometer, mounted on the HDD. Rotational acceleration has been obtained using a recently developed MEMS-based, low cost rotational accelerometer. Experimental results presented here show 20 dB disturbance reduction, achieved with a simple, variable gain feed-forward compensator.

Original languageEnglish
Pages (from-to)174-181
Number of pages8
JournalMicrosystem Technologies
Issue number2-3
Publication statusPublished - May 2002

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation


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