Open loop compensation of the quadrature error in MEMS vibrating gyroscopes

Riccardo Antonello, Roberto Oboe, Luciano Prandi, Carlo Caminada, Fabio Biganzoli

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a simple, yet effective approach for rejecting the quadrature error in MEMS vibratory gyroscopes. The proposed solution consists of an open loop compensation that is performed on the proof-mass displacement readout signal provided by a standard capacitive sensing interface based on parallel-plate capacitors. The compensating signal is generated and calibrated according to the nominal quadrature error to reject, and is injected into the system by means of a compensation circuit based on a dynamically reconfigurable capacitor bank. The compensation scheme described in the paper has been implemented on ASIC and experimentally tested on a real MEMS vibratory gyroscope. Experimental results show that the proposed solution assures good rejection capabilities, even for very large quadrature errors that unavoidably saturates the sensor readout interface.

Original languageEnglish
Title of host publicationIECON Proceedings (Industrial Electronics Conference)
Pages4034-4039
Number of pages6
DOIs
Publication statusPublished - 2009
Event35th Annual Conference of the IEEE Industrial Electronics Society, IECON 2009 - Porto, Portugal
Duration: Nov 3 2009Nov 5 2009

Other

Other35th Annual Conference of the IEEE Industrial Electronics Society, IECON 2009
Country/TerritoryPortugal
CityPorto
Period11/3/0911/5/09

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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